Imec, a leading research and innovation hub in semiconductor technologies, has successfully demonstrated the first wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography. This achievement marks a significant advancement in biosensing technology, providing a scalable platform for applications in life sciences and healthcare. The development was announced on December 9, 2025, in Leuven, Belgium.
The ability to produce nanopores on 300mm wafers allows for high-precision biosensing, particularly in the fields of genomics and proteomics. Historically, the production of solid-state nanopores was limited due to challenges related to variability and integration. Imec’s breakthrough effectively transitions nanopore technology from a laboratory concept to a viable mass-production platform.
With nanopores as small as approximately 10 nanometers, the fabrication process shows potential for creating pores below 5 nanometers through further enhancements in process integration techniques. This opens up possibilities for developing high-throughput, CMOS-compatible biosensor arrays that could significantly accelerate advancements in personalized medicine and rapid diagnostics.
In characterizing the electrical and biomolecular translocation properties of these nanopores, Imec recorded a high signal-to-noise ratio of 6.2, further demonstrating the efficacy of their fabrication methods.
Ashesh Ray Chaudhuri, the R&D project manager at Imec and the first author of the study, stated, “Imec is uniquely positioned to make this leap. We can apply EUV lithography—traditionally reserved for memory and logic—to life sciences. By leveraging our lithography infrastructure, we’ve shown that solid-state nanopores can be fabricated at scale with the precision needed for molecular sensing. This opens the door to high-throughput biosensor arrays for healthcare and beyond.”
Imec’s advancements not only hold promise for healthcare but also for a variety of industries, including computing, automotive, and agrifood. As a world-leading research center, Imec employs over 6,500 professionals and reported revenues of €1.034 billion in 2024. The organization collaborates with global leaders across the semiconductor value chain, technology companies, startups, and academic institutions.
The successful implementation of wafer-scale solid-state nanopores could revolutionize the landscape of biosensing technology, providing essential tools for researchers and healthcare professionals alike. As Imec continues to innovate, the potential applications of this technology are vast and varied, promising to enhance our understanding of biological systems and improve health outcomes worldwide.
For further information, visit Imec’s official website at www.imec-int.com.
